TY  - BOOK
AU  - Landis,Stefan
TI  - Lithography
SN  - 9781848212022
PY  - 2010///
CY  - Hoboken, NJ
PB  - Wiley-ISTE
KW  - Microlithography
KW  - TECHNOLOGY & ENGINEERING / Material Science
KW  - bisacsh
N1  - Includes bibliographical references and index
N2  - 'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'--
ER  -