Landis, Stefan. <br/><br/>
Lithography / 
Stefan Landis. 
 - Hoboken, NJ :  Wiley-ISTE,  2010. 
 - xv, 377 p. :  ill. ; 24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/> 'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'-- 
<br/><br/><label>ISBN: </label>9781848212022  RM443.55 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>TECHNOLOGY & ENGINEERING / Material Science