TY  - BOOK
AU  - Gusev,Evgeni
AU  - Garfunkel,Eric
AU  - Dideikin,Arthur
ED  - SpringerLink (Online service)
TI  - Advanced materials and technologies for micro/nano-devices, sensors and actuators
SN  - 9789048138074 (electronic bk.)
U1  - 621.381 22
PY  - 2010///
CY  - Dordrecht
PB  - Springer Science+Business Media B.V.
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Chemistry
KW  - Microengineering
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=
ER  -