Advanced materials and technologies for micro/nano-devices, sensors and actuators  [electronic resource] / 
edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. 
 - Dordrecht :  Springer Science+Business Media B.V.,  2010. 
 - 322 p. :  ill. (some col.), digital ;  24 cm. 
 - NATO Science for Peace and Security Series B : Physics and Biophysics,  1874-6500 .
<br/><br/><label>ISBN: </label>9789048138074 (electronic bk.) 9789048138050 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Chemistry.<br/>Microengineering.
<br/><br/><label>Dewey Class. No.: </label>621.381