TY  - BOOK
AU  - Leach,Richard K.
TI  - Fundamental principles of engineering nanometrology
SN  - 9780080964546 (hbk.) :
PY  - 2010///
CY  - Oxford
PB  - William Andrew/Elsevier
KW  - Nanotechnology
KW  - Microtechnology
KW  - Metrology
N1  - Includes index
ER  -