Leach, Richard K. <br/><br/>
Fundamental principles of engineering nanometrology / 
Professor Richard K. Leach 
 - Oxford :  William Andrew/Elsevier,  2010 
 - xxvi, 321 p. :  ill. ;  24 cm. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9780080964546 (hbk.) :  RM424.83 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microtechnology<br/>Metrology