Lin, Burn Jeng,  1942- <br/><br/>
Optical lithography :  here is why / 
Burn J. Lin. 
 - Bellingham, Wash. :  SPIE,  2009. 
 - xiv, 477 p. :  ill. ;  26 cm. 
<br/><br/>Includes index. 
<br/><br/><label>ISBN: </label>9780819475602  RM291.35 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Semiconductors--Etching.<br/>Lasers--Industrial applications.