TY - BOOK AU - Cerofolini,Gianfranco TI - Nanoscale devices: fabrication, functionalization, and accessibility from the Macroscopic World : with 84 figures T2 - Nanoscience and technology SN - 9783540927310 PY - 2009/// CY - Berlin, Heidelberg PB - Springer KW - Nanoelectromechanical systems KW - Nanotechnology ER -