Lieberman, Alvin, 1921-

Contamination control and cleanrooms : problems, engineering solutions, and applications / Alvin Lieberman - New York : Van Nostrand Reinhold , 1992 - viii, 411 p. : ill. ; 24 cm.

0442005741 RM210.38

91-044921


Clean rooms
Decontamination (From gases, chemicals, etc.)