TY - BOOK AU - Nabipoor,Mohsen TI - Design and fabrication of a MEMS LC structure for a telemetry pressure and temperature sensor PY - 2010/// CY - Bangi, Selangor PB - Perpustakaan Tun Seri Lanang, Universiti Kebangsaan Malaysia KW - Universiti Kebangsaan Malaysia KW - Dissertations KW - Dissertations, Academic KW - Malaysia KW - Telemeter KW - Microelectromechanical systems KW - Microelectronics N1 - Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008; References : p. [161]-166 ER -