Design and fabrication of a MEMS LC structure for a telemetry pressure and temperature sensor [microform]/
Mohsen Nabipoor
- Bangi, Selangor : Perpustakaan Tun Seri Lanang, Universiti Kebangsaan Malaysia 2010
- 3 microfiches ; 11 x 15cm.
Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008
References : p. [161]-166
Universiti Kebangsaan Malaysia--Dissertations
Dissertations, Academic--Malaysia Telemeter Microelectromechanical systems Microelectronics