TY  - BOOK
AU  - Gad-el-Hak,Mohamed
TI  - MEMS: introduction and fundamentals 
T2  - Mechanical engineering series
SN  - 0849391377
U1  - 621.381 22
PY  - 2006///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=4406
ER  -