TY  - BOOK
AU  - Moyne,James
AU  - Del Castillo,Enrique
AU  - Hurwitz,Arnon Max
TI  - Run-to-run control in semiconductor manufacturing
SN  - 0849311780
U1  - 621.3815/2 21
PY  - 2001///
CY  - Boca Raton
PB  - CRC Press
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductor industry
KW  - Production control
KW  - Electronic packaging
KW  - Production management
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=500
ER  -