Run-to-run control in semiconductor manufacturing  [electronic resource] / 
edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz 
 - Boca Raton :  CRC Press,  2001 
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849311780 
<br/><br/><label>LCCN: </label>00-059910 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Semiconductor industry--Production control<br/>Electronic packaging<br/>Production management
<br/><br/><label>Dewey Class. No.: </label>621.3815/2