The MEMS handbook  [electronic resource] / 
edited by Mohamed Gad-el-Hak 
 - Boca Raton, FL :  CRC Press,  c2002 
 - The Mechanical engineering handbook series .
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849300770 
<br/><br/><label>LCCN: </label>2001-037402 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engineering--Handbooks, manuals, etc.
<br/><br/><label>Dewey Class. No.: </label>621