TY  - BOOK
AU  - Bowen,D.Keith
AU  - Tanner,B.K.
TI  - X-ray metrology in semiconductor manufacturing
SN  - 0849339286 (alk. paper)
U1  - 621.3815/2 22
PY  - 2006///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Semiconductors
KW  - Design and construction
KW  - Quality control
KW  - Integrated circuits
KW  - Measurement
KW  - Semiconductor wafers
KW  - Inspection
KW  - X-rays
KW  - Diffraction
KW  - Fluroscopy
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=4809
ER  -