Bowen, D. Keith  1940- <br/><br/>
X-ray metrology in semiconductor manufacturing  [electronic resource] / 
D. Keith Bowen, Brian K. Tanner 
 - Boca Raton :  CRC/Taylor & Francis,  2006 
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<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849339286 (alk. paper) 
<br/><br/><label>LCCN: </label>2005-052196 
<br/><br/><label>Nat. Bib. No.: </label>GBA597324  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>013338095  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Quality control<br/>Integrated circuits--Measurement<br/>Semiconductor wafers--Inspection<br/>X-rays--Diffraction<br/>Fluroscopy
<br/><br/><label>Dewey Class. No.: </label>621.3815/2