TY  - BOOK
AU  - Suzuki,Kazuaki
AU  - Smith,Bruce W.
TI  - Microlithography: science and technology 
T2  - Optical science and engineering series
SN  - 9780824790240 (alk. paper)
U1  - 621.3815/31 22
PY  - 2007///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microlithography
KW  - Industrial applications
KW  - Integrated circuits
KW  - Masks
KW  - Metal oxide semiconductors, complementary
KW  - Design and construction
KW  - Manufacturing processes
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; 'A CRC title'; Includes bibliographical references and index
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=5515
ER  -