Microlithography  science and technology /  [electronic resource] : 
editors, Kazuaki Suzuki and Bruce W. Smith 
 - 2nd ed. 
 - Boca Raton :  Taylor & Francis,  c2007 
 - Optical science and engineering series .
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen  'A CRC title' 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780824790240 (alk. paper) 0824790243 (alk. paper) 
<br/><br/><label>LCCN: </label>2006-031516 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography--Industrial applications<br/>Integrated circuits--Masks<br/>Metal oxide semiconductors, complementary--Design and construction<br/>Manufacturing processes
<br/><br/><label>Dewey Class. No.: </label>621.3815/31