TY  - BOOK
AU  - Paik,Ungyu
AU  - Park,Jea-Gun
TI  - Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices 
SN  - 9781420059113
U1  - 621.3815/2 22
PY  - 2009///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Chemical mechanical planarization
KW  - Nanoparticles
KW  - Nanoelectronics
N1  - Access to'http://www.engnetbase.com/ejournals/search/advsearch1.asp' and type the title. You may access the full text after you type in the advanced search screen; 'A CRC title'; Includes bibliographical references and index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=7464
ER  -