Paik, Ungyu <br/><br/>
Nanoparticle engineering for chemical-mechanical planarization  fabrication of next-generation nanodevices /  [electronic resource] : 
authors, Ungyu Paik, Jea-Gun Park 
 - Boca Raton :  Taylor & Francis,  2009 
<br/><br/> Access to'http://www.engnetbase.com/ejournals/search/advsearch1.asp' and type the title. You may access the full text after you type in the advanced search screen  'A CRC title' 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781420059113 
<br/><br/><label>LCCN: </label>2008-051282 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical planarization<br/>Nanoparticles<br/>Nanoelectronics
<br/><br/><label>Dewey Class. No.: </label>621.3815/2