Baglio, S. <br/><br/>
Scaling issues and design of MEMS / 
 Scaling issues and design of microelectromechanical systems 
Salvatore Baglio, Salvatore Castorina, Nicolo Savalli 
 - Chichester, West Sussex, England :  John Wiley & Sons,  2007 
 - xiii, 229 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470016992  RM475.80 047001699X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction