Yoshimura, Nagamitsu. Vacuum Technology Practice for Scientific Instruments / [electronic resource] : by Nagamitsu Yoshimura. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008. - 354 p. : ill., digital ; 24 cm. ISBN: 9783540744337 (electronic bk.) 9783540744320 (paper) Subjects--Topical Terms: Vacuum technology.Scientific apparatus and instruments.Physics.Machinery and Machine Elements.Materials Science.Measurement Science, Instrumentation.Nanotechnology.Solid State Physics and Spectroscopy. LC Class. No.: TJ940 / .Y678 2008 Dewey Class. No.: 621.55