TY  - BOOK
AU  - Depla,Diederik
AU  - Mahieu,Stijn
ED  - SpringerLink (Online service)
TI  - Reactive Sputter Deposition
SN  - 9783540766643 (electronic bk.)
U1  - 621.38152 22
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Cathode sputtering (Plating process)
KW  - Thin films
KW  - Chemistry
KW  - Condensed Matter
KW  - Industrial Chemistry/Chemical Engineering
KW  - Physical Chemistry
KW  - Surfaces and Interfaces, Thin Films
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://www.springerlink.com/openurl.asp?genre=book&isbn=978-3-540-76664-3
ER  -