TY  - BOOK
AU  - Mack,Chris A.
TI  - Fundamental principles of optical lithography: the science of microfabrication 
SN  - 9780470018934 (hbk.)
PY  - 2007///
CY  - Chichester, England
PB  - John Wiley & Sons
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
KW  - Industrial applications
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html
ER  -