TY  - BOOK
AU  - Tsuchiya,Toshiyuki
AU  - Tabata,Osamu
TI  - Reliability of MEMS
SN  - 9783527314942 (hbk.)
PY  - 2008///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Reliability
N1  - 'Testing of materials and devices' -- Cover; Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0838/2008459617-t.html
ER  -