Reliability of MEMS / 
edited by Osamu Tabata and Toshiyuki Tsuchiya 
 - Weinheim :  Wiley-VCH,  2008 
 - xx, 303 p. :  ill. ;  25 cm. 
 - Advanced micro & nanosystems ;  v.6 .
<br/><br/> 'Testing of materials and devices' -- Cover 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783527314942 (hbk.)  RM795.80 3527314946 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Reliability