TY  - BOOK
AU  - Liu,Aiqun
ED  - International Conference on Materials for Advanced Technologies
TI  - MEMS technology and devices: Suntec, Singapore, 1-6 July 2007 
SN  - 9789812709608 (hbk.)
PY  - 2007///
CY  - Singapore
PB  - Pan Stanford Pub.
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanostructured materials
N1  - 'ICMAT 2007 conference proceedings'--T.p. verso; Book is accompanied by 1 computer laser optical disc, entitled'MEMS technology and devices CD ROM' bearing the same call number and available at Bahagian Koleksi Media; Includes bibliographical references
ER  -