TY  - BOOK
AU  - Gianchandani,Yogesh B.
AU  - Tabata,Osamu
AU  - Zappe,Hans
TI  - Comprehensive microsystems
SN  - 9780444521910
PY  - 2008///-
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectromechanical systems
N1  - vol. 1; Materials, fabrication and packaging, electronics and systems design -; vol. 2; Actuation mechanism, physical sensing, chemical and biological systems -; vol. 3; Optical systems, industrial applications, emerging topics
ER  -