Comprehensive microsystems / 
editors-in-chief Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe 
 - Amsterdam :  Elsevier,  2008- 
 - 3 v. :  ill. (some col.) ;  27 cm. 
<br/><br/> Materials, fabrication and packaging, electronics and systems design -  Actuation mechanism, physical sensing, chemical and biological systems -  Optical systems, industrial applications, emerging topics  vol. 1.  vol. 2.  vol. 3. 
<br/><br/><label>ISBN: </label>9780444521910 9780444521927 9780444521934 9780444521941  RM4,561.65 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems