TY  - BOOK
ED  - IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tecnology
TI  - IET Seminar on Micro Electro-Mechanical Systems (MEMS) Technology: IET Seminar Digests, April 25, 2007, London, UK 
SN  - 9781605600307
PY  - 2007///]
CY  - New York
PB  - Institution of Engineering and Technology
KW  - Microelectromechanical systems
KW  - Congresses
ER  -