IET Seminar on Micro Electro-Mechanical Systems (MEMS) Technology :  IET Seminar Digests, April 25, 2007, London, UK / 
Institution of Engineering and Technology 
 - New York :  Institution of Engineering and Technology,  [2007] 
 - 68 p. :  ill. ;  27 cm. 
<br/><br/><label>ISBN: </label>9781605600307  RM 379.50 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses