TY  - BOOK
AU  - Mattox,D.M.
TI  - Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control 
SN  - 0815514220
PY  - 1998///
CY  - Westwood, New Jersey
PB  - Noyes Publications
KW  - Physical vapor deposition
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/wap041/97044664.html
UR  - http://www.loc.gov/catdir/toc/wap041/97044664.html
ER  -