Mattox, D. M. <br/><br/>
Handbook of physical vapor deposition (PVD) processing :  film formation, adhesion, surface preparation and contamination control / 
by Donald M. Mattox 
 - Westwood, New Jersey :  Noyes Publications,  1998 
 - xxvii, 917 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0815514220 9780815514220  RM881.46 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physical vapor deposition--Handbooks, manuals, etc.