Kaltenbacher, Manfred. <br/><br/>
Numerical Simulation of Mechatronic Sensors and Actuators  [electronic resource] / 
by Manfred Kaltenbacher. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2007. 
 - xviii, 428 p. :  ill., digital ;  25 cm. 
<br/><br/><label>ISBN: </label>9783540713609 (electronic bk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Mechatronics.
<br/><br/><label>Dewey Class. No.: </label>621.3