TY  - BOOK
AU  - Graf,Markus
ED  - SpringerLink (Online service)
TI  - CMOS Hotplate Chemical Microsensors
T2  - Microtechnology and MEMS,
SN  - 9783540695622 (electronic bk.)
AV  - TK7875 .C64 2007
U1  - 621.38 22
PY  - 2007///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Microfabrication
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-69562-2
ER  -