CMOS Hotplate Chemical Microsensors  [electronic resource] / 
by Markus Graf ... [et al.]. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2007. 
 - xii, 125 p. :  ill. (some col.), digital ;  24 cm. 
 - Microtechnology and MEMS,  1615-8326 .
<br/><br/><label>ISBN: </label>9783540695622 (electronic bk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Microfabrication.
<br/><br/><label>LC Class. No.: </label>TK7875  / .C64 2007 
<br/><br/><label>Dewey Class. No.: </label>621.38