Bechtold, Tamara. <br/><br/>
Fast Simulation of Electro-Thermal MEMS  Efficient Dynamic Compact Models /  [electronic resource] : 
by Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2007. 
 - 1online resource (xi, 180 p.) :  ill. (some col.), digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9783540346135 (electronic bk.) 9783540346128 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Mathematical models.<br/>Engineering.<br/>Electronics and Microelectronics, Instrumentation.
<br/><br/><label>LC Class. No.: </label>TK7875  / .B43 2007 
<br/><br/><label>Dewey Class. No.: </label>621.381