Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration / [electronic resource] :
by Rudiger G. Ballas.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007.
- xiv, 358 p. : ill., digital ; 24 cm.
- Microtechnology and Mems, 1615-8326 .