Towards Synthesis of Micro-/Nano-systems  The 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan /  [electronic resource] : 
by Fumihiko Kimura, Kenichiro Horio. 
 - London :  Springer-Verlag London Limited,  2007. 
 - xiii, 356 p. :  ill., digital ;  31 cm. 
<br/><br/><label>ISBN: </label>9781846285592 (electronic bk.) 9781846285585 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Production engineering--Congresses.<br/>Microtechnology--Congresses.<br/>Nanotechnology--Congresses.<br/>Engineering.<br/>Nanotechnology.<br/>Control Engineering.<br/>Industrial and Production Engineering.<br/>Manufacturing, Machines, Tools.<br/>Operating Procedures, Materials Treatment.<br/>Computer-Aided Engineering (CAD, CAE) and Design.
<br/><br/><label>LC Class. No.: </label>TS176  / .I555 2007 
<br/><br/><label>Dewey Class. No.: </label>620.0045