Nastasi, Michael. <br/><br/>
Ion Implantation and Synthesis of Materials  [electronic resource] / 
by Michael Nastasi, James W. Mayer. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2006. 
 - xiii, 263 p. :  ill., digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9783540452980 (electronic bk.) 9783540236740 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation.
<br/><br/><label>LC Class. No.: </label>TS695.25  / .N37 2006 
<br/><br/><label>Dewey Class. No.: </label>620.11