TY  - BOOK
AU  - Ukita,Hiroo
ED  - SpringerLink (Online service)
TI  - Micromechanical Photonics
SN  - 9783540313724 (electronic bk.)
AV  - TA1520 .U35 2006
U1  - 621.36 22
PY  - 2006///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Photonics
KW  - Microelectronics
KW  - Microelectromechanical systems
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/978-3-540-31372-4
ER  -