Ukita, Hiroo. <br/><br/>
Micromechanical Photonics  [electronic resource] / 
by Hiroo Ukita. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2006. 
 - xi, 250 p. :  ill., digital ;  25 cm 
 - Microtechnology and Mems,  1615-8326 .
<br/><br/><label>ISBN: </label>9783540313724 (electronic bk.) 9783540313335 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Photonics.<br/>Microelectronics.<br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TA1520  / .U35 2006 
<br/><br/><label>Dewey Class. No.: </label>621.36