Bonding in Microsystem Technology [electronic resource] /
by Jan A. Dziuban.
- Dordrecht : Springer, 2006.
- xviii, 331 p. : ill., digital ; 25 cm.
- Springer Series in Advanced Microelectronics, 24 1437-0387 ; .
9781402045899 (electronic bk.)
Microtechnology. Micromachining. Engineering. Optical and Electronic Materials. Electronics and Microelectronics, Instrumentation. Physics and Applied Physics in Engineering. Continuum Mechanics and Mechanics of Materials. Operating Procedures, Materials Treatment.