TY  - BOOK
AU  - Laconte,J.
AU  - Flandre,D.
AU  - Raskin,J.-P.
ED  - SpringerLink (Online service)
TI  - Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
SN  - 9780387288437 (electronic bk.)
AV  - QC168 .L33 2006
U1  - 621.38152 22
PY  - 2006///
CY  - Boston, MA
PB  - Springer
KW  - Gas flow
KW  - Thin film devices
KW  - Silicon-on-insulator technology
KW  - Metal oxide semiconductors, Complementary
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/0-387-28843-0
ER  -