Laconte, J. <br/><br/>
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration  [electronic resource] / 
by J. Laconte, D. Flandre, J. -P. Raskin. 
 - Boston, MA :  Springer,  2006. 
 - xiii, 292 p. :  ill., digital ;  25 cm. 
<br/><br/><label>ISBN: </label>9780387288437 (electronic bk.) 9780387288420 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Gas flow.<br/>Thin film devices.<br/>Silicon-on-insulator technology.<br/>Metal oxide semiconductors, Complementary.
<br/><br/><label>LC Class. No.: </label>QC168  / .L33 2006 
<br/><br/><label>Dewey Class. No.: </label>621.38152