Excimer Laser Technology  [electronic resource] / 
edited by Dirk Basting, Gerd Marowsky. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2005. 
 - xix, 433 p. :  ill., digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9783540266679 (electronic bk.) 9783540200567 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Excimer lasers.<br/>Physics.<br/>Physics and Applied Physics in Engineering.<br/>Electromagnetism, Optics and Lasers.<br/>Laser Technology and Physics, Photonics.<br/>Physical Chemistry.<br/>Measurement Science, Instrumentation.
<br/><br/><label>LC Class. No.: </label>QB843.S95  / I58 2003 
<br/><br/><label>Dewey Class. No.: </label>523.84465