Lobontiu, Nicolae. <br/><br/>
Mechanics of Microelectromechanical Systems  [electronic resource] / 
by Nicolae Lobontiu, Ephrahim Garcia. 
 - Boston, MA :  Springer Science + Business Media, Inc.,  2005. 
 - xi, 405 p. :  ill., digital ;  25 cm. 
<br/><br/><label>ISBN: </label>9780387230375 (electronic bk.) 9781402080135 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Engineering.<br/>Mechanical Engineering.
<br/><br/><label>LC Class. No.: </label>TK7875  / .L63 2005 
<br/><br/><label>Dewey Class. No.: </label>621