TY  - BOOK
AU  - Perevoschikov,Victor A..
AU  - Skoupov,Vladimir D..
ED  - SpringerLink (Online service)
TI  - Gettering Defects in Semiconductors
SN  - 9783540294993 (electronic bk.)
AV  - QC611.6.D4 P4713 2005
U1  - 621.38152 22
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Semiconductors
KW  - Defects
KW  - Materials
KW  - Getters
KW  - Chemistry
KW  - Optical and Electronic Materials
KW  - Industrial Chemistry/Chemical Engineering
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/3-540-29499-6
ER  -