TY  - BOOK
AU  - Hierlemann,Andreas
AU  - Baltes,H..
AU  - Fujita,Hiroyuki
AU  - Liepmann,Dorian
ED  - SpringerLink (Online service)
TI  - Integrated Chemical Microsensor Systems in CMOS Technology
SN  - 9783540273721 (electronic bk.)
AV  - TK7875 .H54 2005
U1  - 621.39732 22
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Metal oxide semiconductors, Complementary
KW  - Microelectromechanical systems
KW  - Sensorimotor integration
KW  - Chemistry
KW  - Optical and Electronic Materials
KW  - Nanotechnology
KW  - Surfaces and Interfaces, Thin Films
KW  - Electronics and Microelectronics, Instrumentation
KW  - Analytical Chemistry
KW  - Measurement Science, Instrumentation
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b138987
ER  -